Structural analysis of alumina thin layer prepared by controlled oxidation process

Abstract

Alumina thin layers were prepared by controlled oxidation process of aluminium obtained by PVD technique. As support steel sampled have been used. The structural analyses and stress state were performed by SEM and XRD techniques. The roughness of surface was pointed out by using an instrument that allows obtaining of 3D surface profile. The structural data allow conducting by a typical soft of the PVD technique such as to obtain alumina thin layer having certain physical and optical properties.