Obtaining Thin Films of ZnO Through Thermal Evaporation in Vacuum and Oxidation
DOI :
https://doi.org/10.35219/mms.2022.2.06Mots-clés :
thermal evaporation of zinc, thermal oxidation, microscopyRésumé
The paper presents the obtaining of thin films out of ZnO by thermal evaporation and oxidation, in a conventional furnace, at various temperatures between 350-550 oC of films from pure Zn deposited. The influence of current intensity, deposition time and oxidation temperature on film structure and transparency was monitored.
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Publiée
2022-06-15
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1.
Obtaining Thin Films of ZnO Through Thermal Evaporation in Vacuum and Oxidation. Ann_UGAL_MMS [Internet]. 15 juin 2022 [cité 2 nov. 2026];45(2):32-7. Disponible sur: https://ojs.ugal.ro/index.php/mms/article/view/5384
