Residual Stress and Tribology Behaviour of TiCx Coating Deposited by NPCVD Method

Abstract

In this paper, thin TiCx films were coated by chemical vapour deposition method, and various duty cycles were carried out in order to observe the influence of this parameter on residual stress and tribology behaviours. The duty cycles were 35, 43 and 50% at 500 ^oC operating temperature. Therefore, wear behaviour, hardness and chemical analyses of TiCx coating were characterised, and it was found that the residual stresses in the coating were compressive, which were1.14189 - 0.12985 and -0.1749 MPa at three different duty cycles, i.e. 35, 43 and 50% respectively. According to the results, the coating that was applied at 43% exhibited superior wear resistance and possessed the lowest friction coefficient of ~ 0.059 in a pin-on-disc test.